Customized ultra low roughness and nanoscale profile control reactive ion cluster tool (MRIE-ICP) for fabrication of high Q integrated photonic resonators for on chip photonics, nonlinear optics and quantum optomechanics

Project funded by Swiss National Science Foundation (SNSF) (R'EQUIP), grant 164014. Participating organisations named by the source: École Polytechnique Fédérale de Lausanne EPFL. Runs 2015-12-01 to 2017-11-30. Keywords: Engineering Sciences. Source: OpenAIRE Graph, from the funder's project data (collected by OpenAIRE on 2017-09-23); national funding data, not CORDIS.

Original source.

Source: OpenAIRE Graph: projects of national funders, OpenAIRE, from the project data of Swiss National Science Foundation (SNSF). Retrieved 2026-11-01. Licence: Creative Commons Attribution 4.0 (OpenAIRE Graph). Selected metadata, adapted presentation; the publisher's record is authoritative. No endorsement by the source is implied. Licence: Creative Commons Attribution 4.0 (CC BY 4.0).

AI-assisted summary: The project focuses on a reactive ion cluster tool for fabricating high Q integrated photonic resonators, funded by the Swiss National Science Foundation from December 2015 to November 2017, with École Polytechnique Fédérale de Lausanne as a participating organization. Suggested technology pillar: enabling. Generated by AI from the public source text; it may contain errors and the original source is authoritative.