Customized ultra low roughness and nanoscale profile control reactive ion cluster tool (MRIE-ICP) for fabrication of high Q integrated photonic resonators for on chip photonics, nonlinear optics and quantum optomechanics

Project funded by Swiss National Science Foundation (SNSF) (R'EQUIP), grant 170752. Participating organisations named by the source: École Polytechnique Fédérale de Lausanne EPFL. Runs 2017-01-01 to 2017-12-31. Keywords: Engineering Sciences. Source: OpenAIRE Graph, from the funder's project data (collected by OpenAIRE on 2017-09-22); national funding data, not CORDIS.

Original source.

Source: OpenAIRE Graph: projects of national funders, OpenAIRE, from the project data of Swiss National Science Foundation (SNSF). Retrieved 2026-11-01. Licence: Creative Commons Attribution 4.0 (OpenAIRE Graph). Selected metadata, adapted presentation; the publisher's record is authoritative. No endorsement by the source is implied. Licence: Creative Commons Attribution 4.0 (CC BY 4.0).

AI-assisted summary: The project focuses on a reactive ion cluster tool for fabricating high Q integrated photonic resonators, funded by the Swiss National Science Foundation from January to December 2017. It involves École Polytechnique Fédérale de Lausanne EPFL and is categorized under Engineering Sciences. Suggested technology pillar: enabling. Generated by AI from the public source text; it may contain errors and the original source is authoritative.