Ultrapure water for nanochip- and quantum chip production. Productification of Yield Enhancement Tool, YET

Project funded by Swedish Governmental Agency for Innovation Systems (Vinnova) (Project grant), grant 2020-00054_Vinnova. Participating organisations named by the source: Nanosized Sweden AB. Funded amount: SEK 900,000, as stated by the source. Runs 2020-04-02 to 2021-05-03. Keywords: Teknik, Engineering and Technology, Nanoteknik, Nano-technology. Source: OpenAIRE Graph, from the funder's project data (collected by OpenAIRE on 2025-12-05); national funding data, not CORDIS. Abstract given by the source: Purpose and goal: The project aimed to develop a so-called Prototype 2 on a clean water module that generates absolutely clean water for cleaning silicon wafers in the semiconductor industry. The prototype must be mobile and as far as possible correspond to the end product. The starting point is a preliminary URS. P2 must be designed externally to function in customers´ clean room facilities, and be equipped with relevant connections. P2 shall be provided with a dispensing module. which transfers water from the water module to the surfaces of the silicon wafers without contaminating the water. Expected results and effects: 2.2 Results and expected effects The project resulted in the delivery of P2 in full compliance with the specifications specified in aim and objective. The project´s aim was to develop a prototype P2 on the clean water module developed in the completed Innovativa Startups 1. This is mainly built in collaboration with the external consultant Reilers. The prototype was delivered in good time according to the project plan and is now installed at the Electrum Laboratory. Approach and implementation: 2.3 Layout and implementation analysis The project´s approach was to work closely with the technology consultant Rejlers. This collaboration worked excellently to the extent that the consultant was sensitive to the adjustments and additions that arose during the work. Furthermore, approval processes took place before and after installations in an exemplary manner. The target consists of two intimately intertwined parts: 1. To build a module (based on membrane tillation) that generates nanoreal water (in practice without contaminants greater than 3 nm.

Original source.

Source: OpenAIRE Graph: projects of national funders, OpenAIRE, from the project data of Swedish Governmental Agency for Innovation Systems (Vinnova). Retrieved 2026-10-28. Licence: Creative Commons Attribution 4.0 (OpenAIRE Graph). Selected metadata, adapted presentation; the publisher's record is authoritative. No endorsement by the source is implied. Licence: Creative Commons Attribution 4.0 (CC BY 4.0).

AI-assisted summary: The project, funded by Vinnova with SEK 900,000, aimed to develop a mobile clean water module for cleaning silicon wafers in the semiconductor industry. It ran from April 2, 2020, to May 3, 2021, and involved Nanosized Sweden AB. Suggested technology pillar: enabling. Generated by AI from the public source text; it may contain errors and the original source is authoritative.